Photonic Crystal based sensor for small forces

Publications

Photonic Crystal based sensor for small forces

Year : 2016

Publisher : Institute of Electrical and Electronics Engineers Inc.

Source Title : Proceedings of the 2015 International Conference on Microwave and Photonics, ICMAP 2015

Document Type :

Abstract

A Photonic Crystal ring resonator based force sensor is proposed. The device consists of Photonic crystal slab integrated on top of a 220nm thick silicon cantilever and is capable of sensing forces as small as 10nN. The sensitivity is derived as 8.33nN for a wavelength resolution of 0.1nm with a high quality factor of 16000.