The scaling parameters have been studied here for lnP(111) surfaces that evolve after implantation with MeV ions. The surfaces show the development of nano pattern and kinetic roughening. Growth exponent β, roughening exponent α and the characteristic wavelength have been studied here at several fluences. Scaling parameters suggest that the surface evolution can not be explained by linear Bradley Harper model or by Kuramoto-Sivashinsky model alone. Copyright © 2008 American Scientific Publishers All rights reserved.