The elemental parts of nonlinearities associated with MEMS devices which were modeled by distributed-parameter equations. The numerical computation of fidelity model derived from discretization scheme creates a large number of ODEs which demands the huge computational efforts. The dynamics of MEMS device reduced with a Galerkin—POD approach, which will suffer their own drawbacks in nonlinearity computation. Therefore, improved strategy over the POD for MOR intricate. This work addressed the drawbacks of POD for MEMS model specifically the dynamical behavior of center point deflection of a beam and their improvements for efficient simulation in data driven framework.