Fabrication of directional coupler using SU-8 wire waveguides by optical lithography

Publications

Fabrication of directional coupler using SU-8 wire waveguides by optical lithography

Year : 2016

Publisher : Optica Publishing Group (formerly OSA)

Source Title : Optics InfoBase Conference Papers

Document Type :

Abstract

Optical directional coupler is fabricated and characterized using SU-8 wire-waveguides; waveguides are being operated in single-mode region. While processing lithography steps, some of the problems and their approached solutions are also discussed.