Design and fabrication of SU-8 polymer based photonic crystal waveguide

Publications

Design and fabrication of SU-8 polymer based photonic crystal waveguide

Year : 2017

Publisher : Optica Publishing Group (formerly OSA)

Source Title : Optics InfoBase Conference Papers

Document Type :

Abstract

We make use of optical lithography along with focused ion beam milling to fabricate our designed photonic crystal waveguide; milling depth of 220nm is obtained with an ion dose of 10K, rms roughness being 33.1nm.