Home Design and Optimization of a 50 nm Dual Material Dual Gate (DMDG), High-к Spacer, FiNFET Having Variable Gate Metal Workfunction

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Design and Optimization of a 50 nm Dual Material Dual Gate (DMDG), High-к Spacer, FiNFET Having Variable Gate Metal Workfunction

Year : 2021

Publisher : Springer Science and Business Media Deutschland GmbH

Source Title : Communications in Computer and Information Science

Document Type :

Abstract

This paper proposes a dual-material dual gate (DMDG) FiNFET architecture that shows superior electrostatic control over the conventional FiNFET and planar MOS devices. The difference in the work function of the used gate metals and improved electrostatic integrity provided by the high-κ spacers mainly led to the performance improvements. Moreover, the proposed DMDG structure explores the possibility of a symmetric FiNFET architecture which will be highly beneficial from circuit application point of view.