Pulsed laser assisted micro-scribing of PCB combined with LIBS based depth monitoring

Publications

Pulsed laser assisted micro-scribing of PCB combined with LIBS based depth monitoring

Author : Dr Sooraj Shiby

Year : 2020

Publisher : Institute of Electrical and Electronics Engineers Inc.

Source Title : 2020 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2020 - Proceedings

Document Type :

Abstract

A nanosecond laser ablation combined with LIBS is demonstrated for a micro-scribing of copper film on dielectric material. NaCl solution was used as a laser-activated etchant in the final scan for minimizing the thermal damage.