Abstract
Micro Electromechanical System also popularly known as MEMS is a technique of combining both mechanical and electrical components to produce a miniature device. The functionality of MEMS devices are mechanical and electrical functions. MEMS has number of micro components integrated on one single chip it is done in such a way to sense and control the environment at the same time. The integration of these chips is done by using micro fabrication technologies. There are few parameters Low Actuation is achieved by using electrostatic mechanism. The proposed RF MEMS switch works at a low pull in voltage at 17V is achieved by electromechanical analysis. The Proposed switch has a capacitance ratio of 159. Electromagnetic analysis is analyzed, and RF performance of the switch is discussed.